Comparative Study on Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air-Conditioning Systems for Semiconductor Manufacturing Clean Rooms

被引：2

作者：

Kim, Hyung-Tae ^{[1
]}

Song, Gen-Soo ^{[2
]}

Kim, Ki-Cheol ^{[2
]}

Yoo, Kyung-Hoon ^{[2
]}

Son, Seung-Woo ^{[3
]}

Shin, Dae-Kun ^{[4
]}

Park, Dug-Jun ^{[5
]}

Kwon, Oh-Myung ^{[1
]}

机构：

[1] Korea Univ, Dept Mech Engn, Seoul, South Korea

[2] Korea Inst Ind Technol KITECH, Nanoscale Contaminat Control Lab, Kangnung, South Korea

[3] Sunglim PS Co, Seoul, South Korea

[4] Daehan PNC Co, Seoul, South Korea

[5] Shinsung ENG Co, Gwacheon Si, South Korea

来源：

TRANSACTIONS OF THE KOREAN SOCIETY OF MECHANICAL ENGINEERS B | 2011年 / 35卷 / 12期

关键词：

Clean Room; Outdoor Air Conditioning System; Energy Consumption; Power Consumption Per Unit Load; Steam Humidification; Water Spray Humidification;

D O I：

10.3795/KSME-B.2011.35.12.1249

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

In modern large-scale semiconductor manufacturing clean rooms, the energy consumed by the outdoor air-conditioning system during heating, humidification, cooling, and dehumidification of the incoming outdoor air represents about 45% of the total air-conditioning load required to maintain a clean-room environment In particular, the energy required for humidification of the outdoor air in winter is very high. Therefore, evaluation and comparison of the energy consumption in key humidification systems, viz., steam-humidification and water-spray-humidification systems, used in outdoor air-conditioning systems would be useful to reduce the outdoor air-conditioning load in clean rooms. In the present study, an experiment with an outdoor air flow of 1000 m(3)/h was conducted to compare the air-conditioning process and energy consumption in outdoor air-conditioning systems with electrode-boiler steam humidifiers and air-washer water spray humidification systems. The experimental results showed that the water-spray-humidification-type outdoor air-conditioning system consumed less electrical power than did the steam-humidification-type system and was more energy efficient during winter.

引用

页码：1249 / 1255

页数：7