3-DIMENSIONAL NANOMETER STRUCTURES

被引：0
|
作者：
CHOU, CC
GREGORY, DA
机构：
[1] Physics Department, University of Alabama in Huntsville, Huntsville, Alabama
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 1993年 / 6卷 / 05期
关键词：
NANOMETER STRUCTURES; MATERIAL GROWTH; OPTICAL DEVICES; MICRODEVICES;
D O I：
10.1002/mop.4650060514
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Three-dimensional (3D) structures in the nanometer range are difficult to create by conventional planar approaches. Having this capability would extend the variety of nanodevices, increase the device unit volume density dramatically, and approach a more completely miniaturized and integrated version of practical device systems. Such systems would be an advantage in signal processing because of low energy consumption and improved measurement resolution.
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页码：314 / 319
页数：6
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