RADIATION-INDUCED TRIVALENT SILICON DEFECT BUILDUP AT THE SI-SIO2 INTERFACE IN MOS STRUCTURES

被引:61
|
作者
LENAHAN, PM [1 ]
BROWER, KL [1 ]
DRESSENDORFER, PV [1 ]
JOHNSON, WC [1 ]
机构
[1] PRINCETON UNIV, DEPT ELECT ENGN & COMP SCI, PRINCETON, NJ 08544 USA
关键词
D O I
10.1109/TNS.1981.4335683
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:4105 / 4106
页数:2
相关论文
共 50 条
  • [1] OPTICAL SPECTROSCOPY OF THE TRIVALENT SILICON DEFECT AT THE SI-SIO2 INTERFACE
    JOHNSON, NM
    JACKSON, WB
    MOYER, MD
    PHYSICAL REVIEW B, 1985, 31 (02): : 1194 - 1197
  • [3] RADIATION-INDUCED SI-SIO2 INTERFACE STATES AND POSITIVE CHARGE BUILDUP OF MOS CAPACITORS ANNEALED IN NITROGEN AND IN HYDROGEN AFTER METALLIZATION
    OHNISHI, K
    USHIROKAWA, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1989, 28 (05): : 877 - 882
  • [4] DEFECT STRUCTURE OF SI-SIO2 INTERFACE, A MODEL BASED ON TRIVALENT SILICON AND ITS HYDROGEN COMPOUNDS
    SVENSSON, CM
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 457 - 457
  • [5] On the nature of the radiation-induced failure of Si-SiO2 structures annealed in hydrogen
    Petrozavodsk State Univ, Karelia, Russia
    Materials Science Forum, 1995, 185-188 : 99 - 104
  • [6] On the Si-SiO2 interface roughness in VLSI-MOS structures
    Sune, J.
    Placencia, I.
    Farres, E.
    Barniol, N.
    Aymerich
    Physica Status Solidi (A) Applied Research, 1988, 109 (02): : 479 - 491
  • [7] ON THE SI-SIO2 INTERFACE ROUGHNESS IN VLSI-MOS STRUCTURES
    SUNE, J
    PLACENCIA, I
    FARRES, E
    BARNIOL, N
    AYMERICH, X
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1988, 109 (02): : 479 - 491
  • [8] MODELING OF RADIATION-INDUCED CHARGE TRAPPING AT THE SI-ASTERISK-SIO2 INTERFACE OF MOS STRUCTURES
    TKACHEV, YD
    LYSENKO, VS
    TURCHANIKOV, VI
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1993, 140 (01): : 163 - 171
  • [9] CHARGE-PUMPING STUDY OF RADIATION-INDUCED DEFECTS AT SI-SIO2 INTERFACE
    AUTRAN, JL
    BALLAND, B
    VALLARD, JP
    BABOT, D
    JOURNAL DE PHYSIQUE III, 1994, 4 (09): : 1707 - 1721
  • [10] TRIVALENT SILICON DEFECTS AT THE SI-SIO2 INTERFACE AND EFFECTS OF OPTICAL AND UV IRRADIATION
    CAPLAN, PJ
    POINDEXTER, EH
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (01): : 20 - 20