APPLICATIONS OF IMAGE-PROCESSING FOR SURFACE CHARACTERIZATION AND DEPTH PROFILING WITH SIMS

被引：1
|
作者：
MICHIELS, F [1 ]
VANHOOLST, W [1 ]
JACOB, W [1 ]
VANESPEN, P [1 ]
ADAMS, F [1 ]
机构：
[1] UNIV INSTELLING ANTWERP,B-2610 WILRIJK,BELGIUM
来源：
MICRON AND MICROSCOPICA ACTA | 1987年 / 18卷 / 03期
关键词：
D O I：
10.1016/0739-6260(87)90083-9
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
引用
收藏
页码：249 / 250
页数：2
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