MICROSTRUCTURE OF SIC THIN-FILMS PRODUCED ON GRAPHITE BY EXCIMER-LASER CHEMICAL-VAPOR-DEPOSITION

被引：1
|
作者：
SUZUKI, H
ARAKI, H
NODA, T
机构：
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1994年 / 13卷 / 01期
关键词：
D O I：
10.1007/BF00680271
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：49 / 52
页数：4
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