METROLOGY FOR IMAGE EVALUATION OF A MICROLITHOGRAPHIC OPTICAL-SYSTEM

被引：0

|

作者：

BRUNNER, TA ^{[1
]}

机构：

[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1986年 / 3卷 / 13期

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：P8 / P8

页数：1

相关论文

共 50 条

[1] THE EVALUATION OF THE IMAGE QUALITY FOR AN OPTICAL-SYSTEM, BY THE CALCULATION OF CONTRAST
SPINEANU, F
REVUE ROUMAINE DE PHYSIQUE, 1981, 26 (07): : 709 - 717
[2] OPTICAL-SYSTEM FOR IMAGE ROTATION AND MAGNIFICATION
BRAUNECKER, B
BRYNGDAHL, O
SCHNELL, B
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1980, 70 (02) : 137 - 141
[3] IMAGE-RESTORATION FOR A DEFOCUSED OPTICAL-SYSTEM
BERRIEL, LR
BESCOS, J
SANTISTEBAN, A
APPLIED OPTICS, 1983, 22 (18): : 2772 - 2780
[4] OBJECT IMAGE IN OPTICAL-SYSTEM WITH OBLIQUE GRATING
KOSOBURD, TP
OPTIKA I SPEKTROSKOPIYA, 1989, 66 (04): : 905 - 909
[5] DESIGN AND EVALUATION OF AN OPTICAL-SYSTEM FOR PANORAMIC IMAGERY
BALDWIN, DM
ROSENDAHL, GR
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1980, 70 (12) : 1565 - 1565
[6] CALCULATION OF THE ABERRATIONS AND IMAGE ASSESSMENT FOR A GENERAL OPTICAL-SYSTEM
HOPKINS, HH
OPTICA ACTA, 1981, 28 (05): : 667 - 714
[7] APPLICATION OF SYNTHESIZED FILTERS FOR THE IMAGE RECOGNITION IN THE OPTICAL-SYSTEM
ILIEVA, MG
PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1985, 11 (08): : 487 - 490
[8] ENERGETIC MODEL OF THE IMAGE SHAPING PROCESS IN THE OPTICAL-SYSTEM
PONKIN, VA
YUKHNO, PM
RADIOTEKHNIKA I ELEKTRONIKA, 1983, 28 (06): : 1051 - 1057
[9] IMAGE-CONTRAST IN THE COHERENT APODIZED OPTICAL-SYSTEM
MAGIERA, A
PIETRASZKIEWICZ, K
OPTIK, 1983, 63 (04): : 305 - 312
[10] IMAGE-CONTRAST IN THE COHERENT APODIZED OPTICAL-SYSTEM
MAGIERA, A
PIETRASZKIEWICZ, K
OPTICA APPLICATA, 1984, 14 (02) : 273 - 284

← 1 2 3 4 5 →