DIFFUSIVITY AND SOLUBILITY OF SI IN AL METALLIZATION OF INTEGRATED CIRCUITS

被引：164
作者：
MCCALDIN, JO
SANKUR, H
机构：
来源：
APPLIED PHYSICS LETTERS | 1971年 / 19卷 / 12期
关键词：
D O I：
10.1063/1.1653799
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：524 / &
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