SEMICONDUCTOR MANUFACTURING - AN INTRODUCTION TO PROCESSES AND HAZARDS

被引：46
|
作者：
WALD, PH [1 ]
JONES, JR [1 ]
机构：
[1] UNIV CALIF SAN FRANCISCO,SCH MED,DEPT MED,DIV OCCUPAT MED,SAN FRANCISCO,CA 94143
来源：
AMERICAN JOURNAL OF INDUSTRIAL MEDICINE | 1987年 / 11卷 / 02期
关键词：
D O I：
10.1002/ajim.4700110209
中图分类号：
R1 [预防医学、卫生学];
学科分类号：
1004 ; 120402 ;
摘要：
引用
收藏
页码：203 / 221
页数：19
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