NEW DESIGN FOR SELF-DEVELOPING IMAGING-SYSTEMS BASED ON THERMALLY LABILE POLYFORMALS

被引：0
|
作者：
FRECHET, JMJ
WILLSON, CG
IIZAWA, T
NISHIKUBO, T
IGARASHI, K
FAHEY, J
机构：
来源：
POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES | 1989年 / 412卷
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
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页码：100 / 112
页数：13
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