SURFACE CHARACTERIZATION VIA OPTICAL DIFFRACTION

被引：2
|
作者：
MANSFIELD, D
机构：
来源：
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 1992年 / 32卷 / 1-2期
关键词：
D O I：
10.1016/0890-6955(92)90054-K
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Through the consideration of a surface as a reflective phase grating, this paper establishes the various relationships between the statistical parameters of the surface topology and the far-field diffraction pattern. These relationships have been incorporated into a new measuring instrument designed primarily for the measurement of flats and cylinders, the Talyfine. The performance of this instrument is compared against an established stylus-based surface texture measuring instrument, the Talystep.
引用
收藏
页码：11 / 17
页数：7
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