GENERATION OF HIGH PEAK POWER EXCIMER LASER-RADIATION BY PULSE SHORTENING

被引：8
|
作者：
TUNNERMANN, A
WREDE, K
WELLEGEHAUSEN, B
机构：
[1] Institut für Quantenoptik, Universität Hannover, Hannover, D-3000
来源：
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY | 1990年 / 50卷 / 05期
关键词：
42.60.-v; 42.65.-Cq;
D O I：
10.1007/BF00325087
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Techniques for shortening the pulses of a commercial oscillator-amplifier excimer laser have been investigated. By a combination of a H2-Raman cell and a saturable absorber dye jet the oscillator pulses are shortened from about 25 ns to typically 1.5 ns. Upon amplification pulses around 3.5 ns with peak powers of more than 100 MW for KrF (248 nm) and 25 MW for XeCl (308 nm) are obtained. © 1990 Springer-Verlag.
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页码：361 / 364
页数：4
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