POSSIBLE UTILIZATION OF A PLASMA OF METALS IN PRECIPITATION PROCESS OF THIN-FILMS

被引：0
|
作者：
PIKUL, MI
DOSTANKO, AP
ROZHKOV, AM
SOSIPATROV, MV
FARENIK, VI
机构：
[1] KHARKOV STATE UNIV,KHARKOV,UKSSR
[2] MINSK RADIOENGN INST,MINSK,BESSR
来源：
ZHURNAL TEKHNICHESKOI FIZIKI | 1977年 / 47卷 / 02期
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D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：313 / 318
页数：6
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