Microstructure of an Si-Cr-Co Alloy for Magnetron Sputtering Targets

被引：0
|
作者：
Kolesnikova, I. G. [1 ]
Maiorov, L. A. [1 ]
Kuzmich, Yu. V. [1 ]
机构：
[1] Russian Acad Sci, Tananaev Inst Chem & Technol Rare Elements & Mine, Apatity, Russia
来源：
RUSSIAN METALLURGY | 2013年 / 11期
关键词：
D O I：
10.1134/S0036029513110074
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
The influence of the cooling rate on the microstructure of an Si-54% Cr-6% Co cast alloy for magnetron sputtering targets is discussed. The alloy contains highly brittle phases CrSi, CrSi2 and Cr3Co5Si2. It is experimentally established that the required quality of a cast target of the considered composition cannot be achieved at high cooling rates of the alloy. Slow cooling can be achieved using a heated casting mold by adjusting the alloy cooling rate. It has been demonstrated that the alloy has the most uniform structure and the lowest porosity at cooling rates in the range 0.5-5 degrees C/s.
引用
收藏
页码：890 / 893
页数：4
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