BEAM CHOPPER FOR SUB-NANOSECOND PULSES IN SCANNING ELECTRON-MICROSCOPY

被引：18
|
作者：
FEUERBAUM, HP
OTTO, J
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1978年 / 11卷 / 06期
关键词：
D O I：
10.1088/0022-3735/11/6/010
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：529 / 532
页数：4
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