ZNSE GROWTH BY LASER-ENHANCED METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION

被引：5
|
作者：
YEH, MY
HU, CC
LIN, GL
LEE, MK
机构：
[1] Institute of Electrical Engineering, National Sun-Yat Sen University, Kaohsiung
来源：
THIN SOLID FILMS | 1992年 / 215卷 / 02期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1016/0040-6090(92)90428-E
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this study, low pressure metal organic chemical vapour deposition was used, accompanied by 488 nm argon ion laser irradiation, to study the growth of ZnSe epilayers. With laser irradiation. a faster growth rate was obtained and the crystallinity was improved. Better optical properties appeared when the growth temperature was below 400-degrees-C. The influence of the laser power density was also examined between 0 and 0.2 W/cm-2 at a growth temperature of 350-degrees-C. The growth rate and quality were improved with increasing laser power density.
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页码：142 / 146
页数：5
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