COMPOSITION AND THERMAL-STABILITY OF THIN NATIVE OXIDES ON INP

被引：71
|
作者：
WAGER, JF
ELLSWORTH, DL
GOODNICK, SM
WILMSEN, CW
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期
关键词：
D O I：
10.1116/1.571049
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：513 / 518
页数：6
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