EFFECTS OF CERTAIN CHEMICAL TREATMENTS AND AMBIENT ATMOSPHERES ON SURFACE PROPERTIES OF SILICON

被引:98
作者
BUCK, TM
MCKIM, FS
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D O I
10.1149/1.2428707
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:709 / 714
页数:6
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