An Application of a Fuel Cell for Measuring Temperature and Humidity within Membrane Electrode Assembly by Micro Sensors

In this study, micro-electro-mechanical-systems ( MEMS) fabrication technology was employed to fabricate an array of micro sensors to monitor the temperature and humidity in situ within the membrane electrode assembly (MEA) of fuel cells. The advantages of array-type micro temperature and humidity sensors are not only their small size enabling them to be placed on MEA, but also their high sensitivity and accuracy preserved at the same time. The experiment involves temperatures from 30 to 100 degrees C, the resistance varied from 51.80 to 57.06 Omega. The accuracy and sensitivity of temperature sensor is less than 0.3 degrees C and 1.5 x 10(-3)/ degrees C. The humidity sensor showed that the capacitance changed from 37.05 to 39.51 pF, the relative humidity from 20 to 95% RH, and the accuracy and sensitivity is less than 0.25% RH and 0.03 pF/% RH.