REDUCTION OF ERRORS OF MICROPHOTOGRAPHIC REPRODUCTIONS BY OPTIMAL CORRECTIONS OF ORIGINAL MASKS

被引：93
|
作者：
SALEH, BEA
SAYEGH, SI
机构：
来源：
OPTICAL ENGINEERING | 1981年 / 20卷 / 05期
关键词：
D O I：
10.1117/12.7972810
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
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页码：781 / 784
页数：4
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