REDISTRIBUTION OF GOLD ATOMS IN EPITAXIAL SILICON LAYERS DURING THE ELECTRON-IRRADIATION

被引:0
|
作者
BOLOTOV, VV [1 ]
EMEKSUZYAN, VM [1 ]
SHORIN, AM [1 ]
SCHMALZ, K [1 ]
BABANSKAYA, I [1 ]
机构
[1] INST HALBLEITERPHYS,FRANKFURT,GERMANY
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关键词
D O I
10.1002/pssa.2211250139
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
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页码:K1 / K5
页数:5
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