FABRICATION OF SUBMICROMETER FEATURES IN Y-BA-CU-O SUPERCONDUCTING THIN-FILMS

被引：5
|
作者：
ROGERS, CT
CHEEKS, TL
ENGLAND, P
CHAN, SW
CRAIGHEAD, HG
VENKATESAN, T
机构：
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1989年 / 25卷 / 02期
关键词：
D O I：
10.1109/20.92535
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1309 / 1312
页数：4
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