VACUUM LITHOGRAPHY USING PLASMA POLYMERIZATION AND PLASMA DEVELOPMENT

被引：14
|
作者：
HATTORI, S [1 ]
TAMANO, J [1 ]
YAMADA, M [1 ]
IEDA, M [1 ]
MORITA, S [1 ]
YONEDA, K [1 ]
ISHIBASHI, S [1 ]
机构：
[1] MEIJO UNIV,DEPT ELECT ENGN,TEMPAKU KU,NAGOYA,AICHI 468,JAPAN
来源：
THIN SOLID FILMS | 1981年 / 83卷 / 02期
关键词：
D O I：
10.1016/0040-6090(81)90665-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：189 / 194
页数：6
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