CO2-LASER DRILLING OF COPPER FOLLOWING EXCIMER LASER PRETREATMENT

被引：6
|
作者：
KINSMAN, G
DULEY, WW
机构：
[1] York University, Laser Processing Laboratory, North York, Ont. M3J 1P3
来源：
APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 11期
关键词：
D O I：
10.1063/1.102574
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Efficient CO2 laser drilling of copper sheet has been obtained following pretreatment with excimer laser radiation at intensities of (1-2)×106 W cm-2. The present studies show a significant reduction in the laser pulse energy, pulse duration, and gas assist parameters required to drill copper sheets with thicknesses of up to 1 mm. Optimization of laser drilling under these conditions involves a material removal regime that differs from that obtained at high laser intensity when drilling untreated surfaces.
引用
收藏
页码：996 / 998
页数：3
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