INTERFACE STATE MEASUREMENTS BY THE DLS-82E LOCK-IN SPECTROMETER

被引：5

作者：

DMOWSKI, K ^{[1
]}

VUILLAUME, D ^{[1
]}

LEPLEY, B ^{[1
]}

LOSSON, E ^{[1
]}

BATH, A ^{[1
]}

机构：

[1] UNIV METZ SUPELEC,CTR LORRAIN OPT & ELECTR SOLIDES,INTERFACES COMPOSANTS & MICROELECTR LAB,F-57078 METZ 3,FRANCE

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 08期

关键词：

D O I：

10.1063/1.1145383

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A calculation procedure to determine the energy distribution of interface states from the deep level transient spectroscopy spectrum measured in metal-insulator-semiconductor structures by means of the DLS-82E lock-in spectrometer is described. Interface states in metal-boron nitride-WP and metal-oxide-Si capacitors have been examined by the DLS-82E spectrometer to demonstrate the practical application of the proposed procedure. (C) 1995 American Institute of Physics.

引用

页码：4283 / 4288

页数：6

共 3 条

[1] PEAK AND SIDE DATA ANALYSES TO MEASURE DEEP LEVELS BY DLS-82E LOCK-IN SPECTROMETER
DMOWSKI, K
LEPLEY, B
LOSSON, E
BATH, A
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1995, 32 (1-2): : 51 - 55
[2] A Fiber-Optic Array Spectrometer With Parallel Multichannel Optical Lock-in Detection and its Application to in Situ Lighting Measurements
Martinsons, Christophe
Picard, Nicolas
Carre, Samuel
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2023, 41 (13) : 4489 - 4495
[3] QUANTUM EFFICIENCY AND METASTABLE LIFETIME MEASUREMENTS IN SOLID-STATE LASER MATERIALS VIA LOCK-IN RATE-WINDOW PHOTOTHERMAL RADIOMETRY - TECHNIQUE AND APPLICATION TO RUBY (CR3+AL2O3)
MANDELIS, A
CHEN, ZH
BLEISS, R
OPTICAL ENGINEERING, 1993, 32 (09) : 2046 - 2053

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