FABRICATION OF DIFFRACTIVE OPTICAL-COMPONENTS FOR AN EXTREME-ULTRAVIOLET SHEARING INTERFEROMETER

被引：1
|
作者：
SPECTOR, SJ
TENNANT, DM
TAN, Z
BJORKHOLM, JE
机构：
[1] AT&T BELL LABS,HOLMDEL,NJ 07733
[2] AT&T BELL LABS,BROOKHAVEN NATL LAB 510E,UPTON,NY 11973
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587452
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3846 / 3850
页数：5
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