Modelling analysis for design of microshutters with new electrode configuration

被引：0
|
作者：
Ke, Ming [1 ,2 ]
Kutyrev, Alexander S. [1 ,3 ]
Kotecki, Carl A. [1 ]
Kim, Kyowon [1 ,4 ]
Greenhouse, Matthew A. [1 ]
Chang, Meng-Ping [1 ]
Fettig, Rainer [1 ,5 ]
Brekosky, Regis P. [1 ]
Hu, Yongjie [2 ]
机构：
[1] NASA Goddard Space Flight Ctr, Greenbelt, MD 20771 USA
[2] Univ Calif Los Angeles, Los Angeles, CA USA
[3] Univ Maryland, College Pk, MD USA
[4] Sci Syst & Applicat Inc, Lanham, MD USA
[5] Beacon Syst Inc, Coral Springs, FL USA
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2022年 / 343卷
关键词：
Electrostatic; Actuator; Microshutter array; Multi-object spectroscopy;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The Next Generation Microshutter Array (NGMSA) is an all-electrostatic actuated, programmable light transmission device used for multi-object spectroscopy. The latest NGMSA is designed to operate by applying a voltage difference between the shutter blade electrode and a single back wall electrode. We investigate the effects of different wall electrode configurations and present a bi-electrode design that allows reliable shutter actuation at a voltage difference of 70V.
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页数：9
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