ION-BEAM APPARATUS IN RANGE OF KEV-ENERGIES

被引:1
|
作者
ISHITANI, T [1 ]
SHIMIZU, R [1 ]
机构
[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA,JAPAN
关键词
D O I
10.1143/JJAP.12.926
中图分类号
O59 [应用物理学];
学科分类号
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页码:926 / 927
页数:2
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