DETERMINATION OF SURFACE IMPURITY CONCENTRATION PROFILES BY NUCLEAR BACKSCATTERING

被引：57
作者：
ZIEGLER, JF
BAGLIN, JEE
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 05期
关键词：
D O I：
10.1063/1.1660483
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2031 / &
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