INVESTIGATION OF METAL-FILM DEPOSITION PROPERTIES ON A SPECIALLY PREPARED SUBSTRATE

被引：0
|
作者：
HAMERSKY, J [1 ]
ZALIS, K [1 ]
机构：
[1] CZECH TECH UNIV PRAGUE, PRAGUE, CZECHOSLOVAKIA
来源：
THIN SOLID FILMS | 1979年 / 59卷 / 02期
关键词：
D O I：
10.1016/0040-6090(79)90291-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：175 / 182
页数：8
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