PREPARATION AND CHARACTERIZATION OF SIO2-SB2O3 FILMS OBTAINED BY A SOL-GEL METHOD

被引：1
|
作者：
PARLOG, C
GARTNER, M
VASILESCU, A
DRAGAN, N
机构：
[1] Institute of Physical Chemistry, Bucharest, 77208
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1992年 / 151卷 / 1-2期
关键词：
D O I：
10.1016/0022-3093(92)90016-D
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
SiO2-Sb2O3 films 600-800 angstrom thick were spin-coated on polycrystalline silicon from a sol prepared from tetraethylorthosilicate and antimony trichloride. One hour heat treatment at 500, 1000 and 1150-degrees-C resulted in crack-free, vitreous, homogeneous films in the first two cases, while at 1200-degrees-C crystallization started to occur. The thickness and refractive index of the films were dependent on the heat treatment. Optical and structural properties of the films were characterized by X-ray, IR spectroscopy, ellipsometry, absorption spectroscopy and electron microscopy. UV absorption spectrum of the SiO2-Sb2O3 films shows discernable bands of pure Sb2O3.
引用
收藏
页码：109 / 114
页数：6
相关论文
共 50 条
  • [1] PREPARATION OF B2O3-SIO2 COATING FILMS BY THE SOL-GEL METHOD
    TOHGE, N
    MATSUDA, A
    MINAMI, T
    YOGYO-KYOKAI-SHI, 1987, 95 (02): : 182 - 185
  • [2] Characterization of mesoporous ZnO:SiO2 films obtained by the sol-gel method
    Martins, R. M. S.
    Musat, V.
    Muecklich, A.
    Franco, N.
    Fortunato, E.
    THIN SOLID FILMS, 2010, 518 (23) : 7002 - 7006
  • [3] PREPARATION OF B2O3-SiO2 COATING FILMS BY THE SOL-GEL METHOD.
    Tohge, Noboru
    Matsuda, Atsunori
    Minami, Tsutomu
    Yogyo Kyokai Shi/Journal of the Ceramic Society of Japan, 1987, 95 (2 pt 2): : 182 - 185
  • [4] Preparation and characterization of ZnO-TiO2 films obtained by sol-gel method
    Ivanova, T.
    Harizanova, A.
    Koutzarova, T.
    Vertruyen, B.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2011, 357 (15) : 2840 - 2845
  • [5] PREPARATION OF B2O3-P2O5-SIO2 COATING FILMS BY THE SOL-GEL METHOD
    MATSUDA, A
    TOHGE, N
    MINAMI, T
    JOURNAL OF MATERIALS SCIENCE, 1992, 27 (15) : 4189 - 4194
  • [6] Preparation of sol-gel method P2O5-Al2O3-SiO2 glasses and their characterization
    Uma, T
    Hattori, K
    Nogami, M
    IONICS, 2005, 11 (3-4) : 202 - 207
  • [7] Preparation of sol-gel method P2O5-Al2O3-SiO2 glasses and their characterization
    T. Uma
    K. Hattori
    M. Nogami
    Ionics, 2005, 11 : 202 - 207
  • [8] PREPARATION AND CHARACTERIZATION OF SiO2-CaCl2 NANOCOMPOSITE BY THE SOL-GEL METHOD
    Tohidi, S. H.
    Ziaie, F.
    Abdolmaleki, A.
    INTERNATIONAL JOURNAL OF ENGINEERING, 2009, 22 (03): : 299 - 305
  • [9] SIO2-SM2O3 VITREOUS FILMS VIA THE SOL-GEL METHOD
    ZAHARESCU, M
    PIRLOG, C
    GARTNER, M
    MOISE, F
    TEODORESCU, V
    JOURNAL OF MATERIALS SCIENCE, 1993, 28 (16) : 4435 - 4441
  • [10] Structural and optical properties of the SiO2-P2O5 films obtained by sol-gel method
    Vasiliu, I.
    Gartner, M.
    Anastasescu, M.
    Todan, L.
    Predoana, L.
    Elisa, M.
    Negrila, C.
    Ungureanu, F.
    Logofatu, C.
    Moldovan, A.
    Birjega, R.
    Zaharescu, M.
    THIN SOLID FILMS, 2007, 515 (16) : 6601 - 6605
12345