INEXPENSIVE AND SENSITIVE LASER-BEAM ALIGNER FOR USE DURING FILM EVAPORATION

被引：0

作者：

BLOOM, JH

SHEPHERD, FD

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.1315375

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：495 / &

共 50 条

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