SCHEDULING SEMICONDUCTOR WAFER FABRICATION

被引：330
|
作者：
WEIN, LM
机构：
[1] MIT, Cambridge, MA, USA
来源：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1988年 / 1卷 / 03期
关键词：
D O I：
10.1109/66.4384
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
23
引用
收藏
页码：115 / 130
页数：16
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