CURRENT-VOLTAGE CHARACTERISTICS OF ALUMINUM NITRIDE FILMS FORMED BY RF GLOW-DISCHARGE

被引：7
|
作者：
MANGALARAJ, D
RADHAKRISHNAN, M
BALASUBRAMANIAN, C
KASILINGAM, AR
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1980年 / 13卷 / 06期
关键词：
D O I：
10.1088/0022-3727/13/6/001
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：L101 / L105
页数：5
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