DEPOSITION OF NEW PIEZOELECTRIC TA2O5 THIN-FILMS AND THEIR SURFACE ACOUSTIC-WAVE PROPERTIES

被引：32
|
作者：
NAKAGAWA, Y
GOMI, Y
OKADA, T
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 11期
关键词：
D O I：
10.1063/1.338321
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：5012 / 5017
页数：6
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