AUTOMATIC SYSTEM FOR RECORDING AND PROCESSING PROBE CHARACTERISTICS IN A LOW-TEMPERATURE PLASMA

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KIRYUKHIN, SV
LOZYUK, VS
OLEINIKOV, AY
SMIRNOV, AY
STEPKIN, AV
TIKHOMIROV, NA
CHMIL, AI
SHUSTIN, EG
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T [工业技术];
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08 ;
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页码:1287 / 1290
页数:4
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