ON THE 3-DIMENSIONAL SHAPES OF ION-IMPLANTATION DISTRIBUTIONS

Using our recently developed modified tomographic reconstruction (MOTOR) technique, we were able to measure three-dimensional distributions of ions implanted into solids. In this work, a spatial implantation distribution of high energy light ions in metals is presented for the first time. The result is compared with theoretical predictions. The ratio of lateral to longitudinal straggling of implantation distributions, as derived from present analytical and Monte-Carlo theories, can be displayed in generalized units, i.e. the results are system and energy independent. For practical use, simple power-law approximations are derived. This ratio is compared with the very few experimental results available.