NONCONTACT, OPTICALLY BASED MEASUREMENT OF SURFACE-ROUGHNESS OF CERAMICS

被引:24
|
作者
JOLIC, KI
NAGARAJAH, CR
THOMPSON, W
机构
[1] CIM Centre, Swinburne Univ. of Technol., Hawthorn, Vic.
关键词
D O I
10.1088/0957-0233/5/6/007
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Examination of various research efforts has revealed that optical techniques best satisfy the requirements of on-line, non-contact inspection; other methods are usually deficient with regard to speed, flexibility and ability to perform non-contact measurement. Of the optical methods considered, techniques based on statistical analysis of scattered light from the sample are best suited for the purpose of surface inspection. A general scheme for an on-line, non-contact, optically based inspection machine has been developed. The system has the important attributes of fast measurement, simplicity and flexibility. The system's roughness measurement capability was successfully tested on ceramic components of varying surface finish.
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页码:671 / 684
页数:14
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