THE SPATIAL-RESOLUTION OF X-RAY-MICROANALYSIS EXPERIMENTAL ASPECTS

If we try to study extremely small Objects with commercial X-ray microprobe we will face the problem of the spatial resolution of the method. Some factors that determine the minimal volume of X-ray source have been well theoretically described but certain factors concern only a class-of instruments or even an individual instrument (X-rays spatial aberration, take-off angle, quality of crystals). We propose the experimental routine in order to calibrate each individual instrument. The routine employing the convolution technique. can be included to the instrument software package.