A NON-DESTRUCTIVE METHOD TO DETERMINE THE STRESS DISTRIBUTIONS OF NEON-IMPLANTED GARNET LAYERS

被引：15
|
作者：
DEROODE, WH
SMITS, JW
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 06期
关键词：
D O I：
10.1063/1.329203
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3969 / 3973
页数：5
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