THERMOMECHANICAL PROPERTIES OF GLOW-DISCHARGE DEPOSITED SILICON AND SILICON-OXIDE FILMS

被引：17
|
作者：
JANSEN, F
MACHONKIN, MA
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词：
D O I：
10.1116/1.575314
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1696 / 1698
页数：3
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