INJECTION OF IONS OF TRANSITIONAL METALS OF IRON GROUP INTO SILICON AND SILICON BREAKDOWN

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BUZANEVA, EV
STRIKHA, VI
SHEVCHUK, PP
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ZHURNAL TEKHNICHESKOI FIZIKI | 1980年 / 50卷 / 01期
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O59 [应用物理学];
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页码：173 / 175
页数：3
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