LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF POLYCRYSTALLINE SI FROM SICL4

被引：51

作者：

BARANAUSKAS, V

MAMMANA, CIZ

KLINGER, RE

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

[3] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 11期

关键词：

D O I：

10.1063/1.91377

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：930 / 932

页数：3

共 50 条

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