CHARACTERISTICS OF CMOS DEVICES IN HIGH-ENERGY BORON-IMPLANTED SUBSTRATES

被引:7
|
作者
ZAPPE, HP
HU, CM
机构
关键词
D O I
10.1109/16.3361
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1029 / 1034
页数:6
相关论文
共 50 条
  • [1] ESTIMATION OF CARRIER SUPPRESSION BY HIGH-ENERGY BORON-IMPLANTED LAYER FOR SOFT ERROR REDUCTION
    KISHIMOTO, T
    SAYAMA, H
    TAKAI, M
    OHNO, Y
    SONODA, K
    NISHIMURA, T
    KINOMURA, A
    HORINO, Y
    FUJII, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12B): : 7148 - 7150
  • [2] THE ELECTRICAL CHARACTERISTICS OF BORON-IMPLANTED INP
    KAMIYA, Y
    SHINOMURA, K
    ITOH, T
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (04) : 780 - 784
  • [3] Boron-Implanted Silicon Substrates for Physical Adsorption of DNA Origami
    Takabayashi, Sadao
    Kotani, Shohei
    Flores-Estrada, Juan
    Spears, Elijah
    Padilla, Jennifer E.
    Godwin, Lizandra C.
    Graugnard, Elton
    Kuang, Wan
    Sills, Scott
    Hughes, William L.
    INTERNATIONAL JOURNAL OF MOLECULAR SCIENCES, 2018, 19 (09)
  • [4] ANNEALING CHARACTERISTICS OF BORON-IMPLANTED AND PHOSPHORUS-IMPLANTED POLYCRYSTALLINE SILICON
    SETO, JYW
    JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5167 - 5170
  • [5] EFFECTS OF HIGH-ENERGY BORON IONS IMPLANTED IN MOSFETS
    DENG, E
    WONG, H
    CHEUNG, NW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 134 - 141
  • [6] Clusters formation in ultralow-energy high-dose boron-implanted silicon
    Cristiano, F
    Hebras, X
    Cherkashin, N
    Claverie, A
    Lerch, W
    Paul, S
    APPLIED PHYSICS LETTERS, 2003, 83 (26) : 5407 - 5409
  • [7] NOVEL EFFECTS OF HEATING RATE ON THE ACTIVATION RECRYSTALLIZATION OF BORON-IMPLANTED SI SUBSTRATES
    JUANG, MH
    CHENG, HC
    SOLID-STATE ELECTRONICS, 1992, 35 (07) : 969 - 973
  • [8] Hole-trapping-related transients in shallow n+-p junctions fabricated in a high-energy boron-implanted p well
    Poyai, A
    Simoen, E
    Claeys, C
    APPLIED PHYSICS LETTERS, 2001, 78 (07) : 949 - 951
  • [9] CO2-LASER ANNEALING CHARACTERISTICS OF HIGH-DOSE BORON-IMPLANTED AND ARSENIC-IMPLANTED SILICON
    TSIEN, PH
    GOTZLICH, J
    RYSSEL, H
    RUGE, I
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) : 663 - 668
  • [10] RANGE OF HIGH-ENERGY PHOSPHORUS AND MEDIUM ENERGY BORON IONS IMPLANTED IN POLYMERS
    TSOUKALAS, D
    SOLID-STATE ELECTRONICS, 1990, 33 (06) : 639 - 643