PREPARATION OF TL2CA2BA2CU3OX SUPERCONDUCTING THIN-FILMS BY DC SPUTTERING

被引：11
|
作者：
CHANG, HL [1 ]
WANG, C [1 ]
CHU, ML [1 ]
UEN, TM [1 ]
GOU, YS [1 ]
机构：
[1] NATL CHIAO TUNG UNIV,DEPT ELECTROPHYS,HSINCHU,TAIWAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1989年 / 28卷 / 04期
关键词：
D O I：
10.1143/JJAP.28.L631
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L631 / L634
页数：4
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