STRUCTURE CHANGES IN PBTIO3 FILMS INDUCED BY ION-IMPLANTATION WITH AR+ AND N+

被引：2

作者：

QU, BD

WANG, YG

WANG, ZL

ZHONG, WL

WANG, KM

机构：

[1] Department of Physics, Shandong University, Jinan

来源：

PHYSICS LETTERS A | 1992年 / 167卷 / 04期

关键词：

D O I：

10.1016/0375-9601(92)90282-Q

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Structure changes of PbTiO3 films induced by ion implantation with Ar+ and N+ were measured by X-ray diffraction and MeV He-4+ Rutherford backscattering. The lead segregation which occurred in the volume of the collision cascade and the amorphization of the surface layer of the films are discussed.

引用

页码：411 / 414

页数：4