STRUCTURE CHANGES IN PBTIO3 FILMS INDUCED BY ION-IMPLANTATION WITH AR+ AND N+

被引:2
|
作者
QU, BD
WANG, YG
WANG, ZL
ZHONG, WL
WANG, KM
机构
[1] Department of Physics, Shandong University, Jinan
关键词
D O I
10.1016/0375-9601(92)90282-Q
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Structure changes of PbTiO3 films induced by ion implantation with Ar+ and N+ were measured by X-ray diffraction and MeV He-4+ Rutherford backscattering. The lead segregation which occurred in the volume of the collision cascade and the amorphization of the surface layer of the films are discussed.
引用
收藏
页码:411 / 414
页数:4
相关论文
共 50 条
  • [41] N AND AR ION-IMPLANTATION EFFECTS IN SIO2-FILMS ON SI SINGLE-CRYSTAL SUBSTRATES
    MAZZOLDI, P
    CARNERA, A
    CACCAVALE, F
    FAVARO, ML
    BOSCOLOBOSCOLETTO, A
    GRANOZZI, G
    BERTONCELLO, R
    BATTAGLIN, G
    JOURNAL OF APPLIED PHYSICS, 1991, 70 (07) : 3528 - 3536
  • [42] CENTERS OF SPIN-DEPENDENT RECOMBINATION IN STRUCTURES FORMED BY N+ ION-IMPLANTATION INTO SI
    KARANOVICH, AA
    DVURECHENSKII, AV
    TYSCHENKO, IE
    KACHURIN, GA
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : 630 - 632
  • [44] Structural characterization of PbTiO3 thin films prepared by ion beam induced CVD and evaporation of lead
    Leinen, D
    Caballero, A
    Fernandez, A
    Espinos, JP
    Justo, A
    GonzalezElipe, AR
    Martin, JM
    MaurinPerrier, B
    THIN SOLID FILMS, 1996, 272 (01) : 99 - 106
  • [45] Structure and phase transition of PbTiO3 polycrystalline ferroelectric thin films
    Liu, WG
    Zhang, LY
    Yao, X
    FERROELECTRICS, 1997, 195 (1-4) : 265 - 268
  • [46] Structure and phase transition of PbTiO3 polycrystalline ferroelectric thin films
    Liu, Weiguo
    Zhang, Liangying
    Yao, Xi
    Ferroelectrics, 1997, 195 (1 -4 pt 1): : 265 - 268
  • [47] Tailoring of optical and gas sensitivity behaviors of WO3 films by low energy Ar+ ion implantation
    Keshri, Sunita
    Kumar, Ashutosh
    Kabiraj, Debdulal
    THIN SOLID FILMS, 2012, 526 : 50 - 58
  • [48] AR ION-IMPLANTATION INDUCED TC DEGRADATION OF YBA2CU3O7-X THIN-FILMS
    LI, YJ
    REN, CX
    CHEN, GL
    LIN, ZX
    ZOU, SC
    CHINESE PHYSICS LETTERS, 1991, 8 (03) : 158 - 160
  • [49] Crystalline structure of PbTiO3 thin films by multiple cathode sputtering
    Maiwa, Hiroshi
    Ichinose, Noboru
    Okazaki, Kiyoshi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1992, 31 (9 B): : 3029 - 3032
  • [50] Correlation between the domain structure and ferroelectricity in PbTiO3 thin films
    Byun, C
    Jang, JW
    Lee, BW
    MATERIALS LETTERS, 1998, 34 (3-6) : 308 - 311