PARTICLE-BEAM FABRICATION AND INSITU PROCESSING OF INTEGRATED-CIRCUITS

被引：4
|
作者：
STECKL, AJ [1 ]
机构：
[1] RENSSELAER POLYTECH INST,DEPT ELECT COMP & SYST ENGN,TROY,NY 12181
来源：
PROCEEDINGS OF THE IEEE | 1986年 / 74卷 / 12期
关键词：
D O I：
10.1109/PROC.1986.13690
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
107
引用
收藏
页码：1753 / 1774
页数：22
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