CRYSTAL-SURFACE QUALITY INSPECTION USING COMPUTER-GENERATED HOLOGRAM AND DIGITAL IMAGE-PROCESSING

被引：3
|
作者：
RASANEN, J
PEIPONEN, KE
SILVENNOINEN, R
SILFSTEN, P
机构：
[1] Väisälä Laboratory, Department of Physics, University of Joensuu
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1992年 / 134卷 / 02期
关键词：
D O I：
10.1002/pssa.2211340230
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K53 / K55
页数：3
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