EFFICIENCY OF A CAPACITOR-TRANSFER-TYPE DISCHARGE EXCIMER LASER WITH AUTOMATIC PREIONIZATION

被引：32

作者：

MIYAZAKI, K

HASAMA, T

YAMADA, K

FUKATSU, T

EURA, T

SATO, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 08期

关键词：

D O I：

10.1063/1.337102

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2721 / 2728

页数：8

共 13 条

[1] LONGITUDINAL DISCHARGE XECL EXCIMER LASER WITH AUTOMATIC UV PREIONIZATION
FURUHASHI, H
HIRAMATSU, M
GOTO, T
APPLIED PHYSICS LETTERS, 1987, 50 (14) : 883 - 885
[2] Discharge excimer laser with an automated spark preionization
Fedorov, A.I.
Atmospheric and Oceanic Optics(English Edition of the Journal Optika Atmosfery i Okeana), 1997, 10 (11):
[3] EFFICIENT AND COMPACT DISCHARGE XECL LASER WITH AUTOMATIC UV PREIONIZATION
MIYAZAKI, K
TODA, Y
HASAMA, T
SATO, T
REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (02): : 201 - 204
[4] COMPACT AND RELIABLE DISCHARGE-PUMPED XECL LASER WITH AUTOMATIC PREIONIZATION
HIRAMATSU, M
GOTO, T
REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (04): : 534 - 538
[5] Development of an X-ray preionized capacitor-transfer-type XeCl laser and computor simulation of its operational characteristics
Hasama, T.
Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory, 1994, 58 (11-12):
[6] LONGITUDINAL DISCHARGE N-2 LASER WITH AUTOMATIC PREIONIZATION USING AN LC INVERSION CIRCUIT
FURUHASHI, H
GOTO, T
REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (12): : 2552 - 2556
[7] A TWIN-TYPE DISCHARGE-PUMPED EXCIMER LASER
MAEDA, M
MIZUNAMI, T
SATO, A
TAKAHASHI, A
MIYAZOE, Y
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (12): : 1784 - 1784
[8] Effect of preionization, fluorine concentration, and current density on the discharge uniforrhity in F2 excimer laser gas mlixtures
Mathew, D.
Bastiaens, H. M. J.
Boller, K. J.
Peters, P. J. M.
JOURNAL OF APPLIED PHYSICS, 2007, 102 (03)
[9] EFFICIENCY OF A COPPER-VAPOR LASER WITH PARTIAL DISCHARGE OF A STORAGE CAPACITOR
SOLDATOV, AN
FEDOROV, VF
YUDIN, NA
KVANTOVAYA ELEKTRONIKA, 1994, 21 (08): : 733 - 734
[10] EFFICIENCY OPTIMIZATION FOR DISCHARGE-EXCITED HIGH-ENERGY EXCIMER LASER
ROTHE, DE
WALLACE, C
PETACH, T
AIP CONFERENCE PROCEEDINGS, 1983, (100) : 33 - 44

← 1 2 →