50-NM X-RAY-LITHOGRAPHY USING SYNCHROTRON-RADIATION

被引：66
|
作者：
CHEN, Y
KUPKA, RK
ROUSSEAUX, F
CARCENAC, F
DECANINI, D
RAVET, MF
LAUNOIS, H
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587410
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3959 / 3964
页数：6
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