MOLECULAR STREAM EPITAXY AND THE ROLE OF THE BOUNDARY-LAYER IN CHEMICAL VAPOR-DEPOSITION

被引：5
|
作者：
KATSUYAMA, T
BEDAIR, SM
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 10期
关键词：
D O I：
10.1063/1.341155
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：5098 / 5103
页数：6
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